Step Profiler

Kuwait University
COLLEGE OF ENGINEERING & PETROLEUM

The KLA-Tencor D120 Stylus profiler  is a mechanical machine that can measure step heights up to millimeter range and can give the profile of the steps.

Specifications

  • Z sensor range up to 1.2 mm
  • 200mm motorized sample positioning stage (150mm x178 mm motion)
  • Force control 0.03mg – 10mg
  • 4X motorized zoom camera
  • 6 angstrom step height repeatability
  • 55 mm scan length


Applications:

  • Surface Texture
  • Precision step height
  • Surface form
  • Biological
  • MEMS
  • Material Characterization