Agilent 5420 SPM/ Atomic force microscopy (AFM) or scanning force microscopy (SFM) is a very high-resolution type of scanning probe microscopy. It is one of the foremost tools for imaging, measuring, and manipulating matter at the nano-scale. The information is gathered by "feeling" the surface with a mechanical probe. Different conducting cantilevers used for scanning depend on the mode and the type of the sample. AFM operation is usually described as one of the following modes, according to the nature of the tip motion:
It is particularly useful for semiconductor test and characterization. It can be used to acquire calibrated capacitance and dopant density measurements and to enable complex impedance (resistance and reactance) measurements. It works on all major semiconductor types, glasses, polymers, ceramics, and metals.